Karl Suss Mask Aligners are regarded as the benchmark in semiconductor submicron research and 3D micro-system production. These innovative systems meet customer's needs for precision and reliability.
This versatile SUSS MA4 is available with bottom-side-alignment microscopes (optical) for accurate backside processes. Optical bottom-side-alignment (BSA) has become an important feature, especially in Microsystem Technology.
Lamphouse:
350 Watt lamphouse
Optics:
365nm (NUV) optics
Microscope:
M200 split-field optical microscope
CIC Power Supply:
CIC 500 constant intensity controller
Wafer Size:
Pieces of wafers and full wafers up to 4 inches (100mm)
Wafer Chuck:
Includes choice of one (1) wafer alignment chuck for Customer's desired wafer size
Mask Holder:
Includes choice of one (1) mask holder for Customer's desired wafer size
Equipment Condition:
Fully refurbished and guaranteed to meet the OEM's original specifications
Warranty:
Includes 90-day equipment parts warranty
OPTIONS AND UPGRADES AVAILABLE:
EQUIPMENT CAN BE UPGRADED TO OTHER CONFIGURATIONS FOR AN ADDITIONAL COST
MA6 CONFIGURATION OPTION/UPGRADE:
This option/upgrade will include replacing 350W lamphouse with a 1000W lamphouse; replacing CIC500 with a CIC1000; upgrading wafer chuck to 6 inch (150mm); upgrading mask holder to 7x7 mask holder. THIS OPTION / UPGRADE IS AVAILABLE FOR ADDITIONAL COST
DEEP UV EXPOSURE (DUV) OPTION/UPGRADE:
This option/upgrade will include replacing 350W lamphouse with a 1000W lamphouse; replacing CIC500 with a CIC1000; replacing 350W Hg lamp with a 500W HgXe lamp; upgrading optics & mirrors from UV400 to a UV200 DUV package. THIS OPTION / UPGRADE IS AVAILABLE FOR ADDITIONAL COST
