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Semitool / Rhetech 4300S Spin Rinser Dryer (SRD)
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Item Number 		spacer
10122
The Semitool 4300S "roll-around" single-stack SRD is capable of 25-wafer batch processing. It offers high-performance wafer cleaning, rinsing and drying.
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Wafer Size: 		spacer
Currently configured with 6-inch (150mm) rotor
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Bowl Diameter: 		spacer
15-inches (380mm)
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Maximum Round Substrate Size: 		spacer
9-inches (230mm)
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Maximum Square Substrate Size: 		spacer
8.75-inches (220mm)
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Rotor Type: 		spacer
Requires 4-bolt rotors
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Controller: 		spacer
Semitool PSC-101 controller
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Resistivity Meter: 		spacer
Yes
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Vintage: 		spacer
July 2002
(Click on photo to enlarge)
Semitool / Rhetech 4300S (Spin Rinser Dryer (SRD) Equipment) Semitool / Rhetech 4300S (Spin Rinser Dryer (SRD) Equipment)

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Semitool / Rhetech 4300S (Spin Rinser Dryer (SRD) Equipment)
Spectrum Process Equipment, Inc.
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