Spectrum Process Equipment Logo Header Background
Search for available equipment
spacer spacer
Grid
About Us
Wafer Fabrication and Laboratory Equipment For Sale
Equipment Wanted
Terms and Conditions
Contact Us
Wafer Background
Join Our Email List
Email:  
Grid
spacer spacer
Semitool / Rhetech 870F Spin Rinser Dryer (SRD)
Click here to contact us regarding this item.
spacer
Item Number 		spacer
10121
The Semitool 870 dual-stack SRD is capable of 25-wafer batch processing. It offers high-performance wafer cleaning, rinsing and drying.
spacer
Wafer Size: 		spacer
Currently configured with 6-inch rotors
spacer
Bowl Diameter: 		spacer
11.5-inches (290mm)
spacer
Maximum Round Substrate Size: 		spacer
6-inch (150mm)
spacer
Maximum Square Substrate Size: 		spacer
6-inch (150mm)
spacer
Rotor Type: 		spacer
270-style rotor (4-bolt)
spacer
Controller: 		spacer
Semitool PSC-101 controllers
spacer
OPTIONS:
spacer
9-Recipe Controller (PSC-102): 		spacer
No
spacer
Resistivity Monitor (RM-20): 		spacer
Yes
spacer
Anti Static w/ N2 Purge (CY-20): 		spacer
Yes
spacer
ION SYSTEM Anti Static w/ Remote N2 Heater (ION-1): 		spacer
No
spacer
DI Water Recirculation (WR-20B): 		spacer
Yes
spacer
Emergency Power Off (EPO): 		spacer
Yes
spacer
Mechanical Door Lock (DL-20): 		spacer
No
(Click on photo to enlarge)
Semitool / Rhetech 870F (Spin Rinser Dryer (SRD) Equipment) Semitool / Rhetech 870F (Spin Rinser Dryer (SRD) Equipment) Semitool / Rhetech 870F (Spin Rinser Dryer (SRD) Equipment)

Grid
 spacer
spacer spacer
Semitool / Rhetech 870F (Spin Rinser Dryer (SRD) Equipment)
Spectrum Process Equipment, Inc.
spacer
spacer

 

Privacy Policy      |     Site Map

 

         ©2003-2008             Spectrum Process Equipment, Inc., P.O. Box 96, Wernersville, PA 19551

             

     Phone: +1 (610) 693-8141                Fax: +1 (801) 218-4326                 Email: info@1spectrum.com