The Glen R3A Plasma Cleaning System is PLC controlled and offers real-time plain English readout of system operating parameters together with remedial action in the event of an abort. This 500 watt plasma cleaner has two 14 x 14-inch electrode sets (capable of up to 8 sample trays) which can be quickly configured to provide any of these three plasma modes: Active Plasma for routine cleaning of sample surfaces; RIE Plasma for aggressive cleaning of non ESD sensitive samples; and Downstream, Electron-Free Plasma for cleaning sensitive electronic components normally associated with the semiconductor industry. The Glen R3A Plasma Cleaner can be operated in a single or dual plasma sequence with two computer selected plasma gas inputs and a connection for a backfill gas (typically nitrogen). The Glen R3A has RS 232 interface as standard.
System Power Source:
Advanced Energy PE-1000 AC Plasma Power Source
Electrodes:
Qty-2 14 x 14-inch electrode sets; capable of up to 8 sample trays
3 Plasma Modes:
ACTIVE PLASMA for routine cleaning of sample surfaces; RIE PLASMA for aggressive cleaning of non-ESD sensitive samples; and DOWNSTREAM ELECTRON-FREE PLASMA for cleaning sensitive electronic components
