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Verteq 1600-55M Rinser/Dryer
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Item Number
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10021
The Verteq SuperClean 1600-55M is a state-of-the-art, single carrier, front-loading spin rinser dryer. The SuperClean 1600-55M incorporates all that Verteq has learned about rinser dryer processing, and the demanding needs for reliability and serviceability in today's volume production fabs.
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Multi-step, multi-cycle controller
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Digital readout and acid resistant control panel
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Teflon DI water plumbing
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Built in resistivity monitor
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RS232 interface
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Currently configured for 5 inch wafers
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Vintage:
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1997
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Power Requirements:
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120VAC, 15A, 50/60Hz

(Click on photo to enlarge)
Verteq 1600-55M (Rinser/Dryer Equipment) Verteq 1600-55M (Rinser/Dryer Equipment) Verteq 1600-55M (Rinser/Dryer Equipment)
Verteq 1600-55M (Rinser/Dryer Equipment) Verteq 1600-55M (Rinser/Dryer Equipment)

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Verteq 1600-55M (Rinser/Dryer Equipment)
Spectrum Process Equipment, Inc.
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