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10073 Equipment Support Company (ESC) ELAS Sputtering System
  The ELAS (ESC Large Area Sputtering System) offers cassette to cassette operation for 4-inch, 6-inch and 8-inch wafers using an industry standard Brooks robot system.
10037 Surface Technology Systems (STS) Multiplex Plasma Wafer Processor

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Spectrum Process Equipment, Inc.
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         ©2003-2008             Spectrum Process Equipment, Inc., P.O. Box 96, Wernersville, PA 19551

             

     Phone: +1 (610) 693-8141                Fax: +1 (801) 218-4326                 Email: info@1spectrum.com