Cascade Microtech SUMMIT 10000 Series Wafer Probe System
The Cascade Microtech 10000-series probe systems allow you to access the full measurement range of your test instrumentation. Noise, leakage, stray capacitance and measurement settling times have been greatly reduced. Whatever the application: DC or RF device characterization, wafer-level reliability, e-test, modeling, or yield enhancement, the 10000-series probe stations assure best-in-the-world measurements.
The Summit 10600 Thermal Probing System with its integrated MicroChamber (TM) shields the wafer under test from the ambient air, light, and electromagnetic interference (EMI). Because the MicroChamber is small (0.25 ft3/7.0 I) compared to a glove box, the purge time is less than 15 minutes (compared to several hours for a glove box). An automatic calibration procedure removes the temperature-related drift caused by the probes and cables changing temperature.
The Summit 10000-series system has been used for developing and verifying device models. This means that accuracy is critical, as these models are used to design complex ICs that need to work the first time.
The Leica INS-1000 is an ergonomically designed optical wafer inspection station featuring a custom designed robotics handling system and stage ultimate in accuracy and stability, a Leica INM-200 Microscope assembly and an IBM Compatible PC system providing Windows NT based User Interface (UI) software.
The Leica INS-1000 User Interface provides: (1) automated access to robotics and microscopy hardware in a manner which facilitates visual inspection of semiconductor wafers, (2) the capability to use a video display to present status and controls to the operator, (3) the capability to accept operator input through the keyboard, mouse and joystick and (4) Simple, quick, intuitive control and programming of the system with minimal training. The Leica INS-1000 supports two types of wafer inspection: (1) Macro Inspection - a bright light inspection performed on the PreAligner and (2) Micro Inspection - inspection performed on the stage with microscope viewing.
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